Advanced wafer prober

Panel Laser Prober

MDSM-TEG6/MDSM-TEG8.5
Product description: wafer prober
INQUIRY

Application Direction

TEG Electrical testing of OLED/T FT-LCD panels

Product Introduction

The MDSM-TEG series panel laser probe is mainly used to analyze the TEG circuit of LCD screens, test electrical parameters, and provide fully automated testing application solutions. Furthermore this product can quickly and accurately analyze the product's performance and further repair the defects, greatly improving the yield and efficiency of production.

Product Features

1.The faster test speed greatly improves the test efficiency

2.Leading internal anti - shock system device for more stable operation

3.0.1um high precision linear motor platform

4.Electrical shielding system, shielding light and electromagnetic interference

5.Super high test precision, accurate measurement is stable and reliable

6.Compatible with high power metal lo-graphic microscope, automatic focusing

7.Automatic probe clearing, automatic probe testing

8.Automatic test and data read

Product Parameters

Model		TEG prober-G6
Dimension		W: 2850mm * L: 2500mm * H: 2500m
Weight		9700KG
Electricity Demand		380V, 50Hz, 3Phase, approx. 50A Max
Panel size		L * W ≤1500 * 1850mm, Thickness ≤ 3mm
Platform function	Gantry structure	Gantry, can choose double gantry
	X-Y-Z travel range	1850150058mm(X-Y-Z)
	X-Y velocity	0~600mm/s adjustable
	X-Y resolution	0.1μm
	X-Y Repeatability	±1um
	X-Y axis drive	Linear motion + Grating ruler
	Z velocity	0~10mm/s adjustable
	Z resolution	0.25um
	Z Repeatability	±1um
	Z axis drive	Servo motor + Grating ruler
	Z axis protection	Motor self-locking + Mechanical limit protection
	Platform flatness	±50um
	Platform coating	Anti static coating
	Platform high/low temperature	Temp Chuck or Thermal Stream(-55~200°C)
Microscope	Optical circuit system ratio Magnification range	① 5X, 10X, 20X, 50X Objects ②50X~500X
	Focus	Autofocus
	CCD pixel	200W/500W
	Light source	TOP/Bottom coaxial LED light Light adjustable independently
Laser	Laser system	Laser cutting system (2.2mj/Pl use Maximum@50Hz) 0-100%
	Laser wave length	1064nm, 532nm, 355nm
	Spot scale	1.0um @100X object；2.0um@50X object
	Work pattern	One Shot/Burst/Continue
	Shape	Adjustable rectangle
Control	mode	Automatic test, automatic data load and communication Semi-automatic/full-automatic test
	Sample Exchange	Robot
	CIM system	Yes
	Anti-vibration	Vibration free table installed
	Industry PC	23-inch display & computer: i7 processor, 2 blocks 1TB hard disk(one of which is a backup hard disk), 8G memory, 1G Independent video card, DVD-ROM
	communication interface	RS232/485/TCP/IPGPIB, etc.
	Security	Frame covered, and the operator operates outside
		EMO
		Limit sensor, Motion platform and Laser system limit interlock
		Alarm

Model		TEG prober-G8.5
Dimension		W: 4000mm * L: 3500mm * H: 2500m
Weight		14200KG
Electricity Demand		380V, 50Hz, 3Phase, approx. 50A Max
Panel size		L * W ≤2500 * 2200mm, Thickness ≤ 3mm
Platform function	Gantry structure	Gantry, can choose double gantry
Platform function	X-Y-Z travel range	2500220058mm(X-Y-Z)
Prober	Probe card	Two sets, can test two sets of pattern at the same time
		Pitch and layout: Customizing
		Probe material: Tungsten or Beryllium copper
		Working mode: test alone, or test two probe cards together. Their mutual distance is adjustable.
	Probe and TEG alignment	Coordinate positioning
	Probe and TEG alignment	Secondary vision automatic calibration
	Probe and TEG Contact mode	Automatic contact Mechanical limit
	Probe and TEG Contact mode	Sedge sensor and software protection,The limit height can be set according to the thickness of the panel, and the OD value can be set.
	Probe rotation stroke	±90°
	Probe rotation accuracy	0.01°
	Potation repeatability	0.03°
	Probe cleaning	Automatic cleaning
	Probe cleaning	Electrical test after cleaning
	Prober current leakage	Within 100fA (Test standard: - 5v ~ +5v, without blowing N2 and floating).
Tester	Test system	Two sets Semiconductor parameter testing system, 2* HRSMU+4*M PSMU + CV test+High precision matrix switch etc.
	TFT test project	Lon
		loff
		Vth
		Mobility
		Swing
		Rs
		Rc
	Maximum test voltage	±200V
	Maximum test current	±1A
	Current test resolution	1fA (No preamplifier)
	Voltage test resolution	0.5uV
	Cv test frequency range	1kHz~5 MHz
Grounding unit accommodation capacity		4.2A GNDU