Advanced wafer prober

Laser Panel Highlight Repair Machine

MDSM-Flex85
Product description: wafer prober
INQUIRY

Application Direction

Tft-lcd panel bright spot repair, OLED panel bright spot repair

Product Introduction

MDSM-Flex85 is a laser panel repair device that highlights abnormalities and defects in display panels. With the leading machine vision at its core, this equipment can provide high-precision and low-cost solutions for the defects of LCDs and semi-finished products, which greatly improves the yield and economic benefits of the enterprise's technological processes.

Product Features

1.Laser system visual operation, greatly improve the efficiency of repair

2.Repair shape can be edited, can be multi -station design

3.Linear motor structure, 1um laser precision and low noise at high speed

4.Leading internal anti - shock system device, more stable operation

5.High power optical image recognition, automatic calibration focus

6.Local darkening can be achieved

7.Automatic AOI positioning, automatic placement of upper and lower wafers

8.Rich software testing function, high preci-sion calibration of mechanical system

Product Parameters

Model		MDSM-Flex85
Dimension		W: 3000mm * L: 2500mm * H: 2500m
Weight		7500KG
Electricity Demand		380V, 50Hz, 3Phase, approx. 50A Max
Repair ability	Sample size	3~85 inch
	Repairable range	Any position in the panel
	Repair time	120s or so per pixel (pixel in size 200µm*100μm)
	Repairable product type	Cell (OLED, IPS, ON-CELL/IN-CELL TFT panel etc.), Module (with/without polarizer)
	Shading performance	Not visible when module backlight turn on
Gantry	X-Y-Z travel range	2000 * 1200 * 50mm
	Moving resolution	0.1μm
	X-Y velocity	0~400mm/s
	Z velocity	0~2mm/s Adjustable
	Location	AOI automatic defect location
Microscope	Optical circuit system ratio	50X~1000X, 5X, 10X, 20X, 50X, 100X Objects
	Objective switching speed	0.2~0.7s
	Focus	Laser auto focusing
	Optical resolution	0.7µm
	Camera	200W/500W Pixel industrial camera
Laser	Laser system	Ultra fast laser
	Energy control	0~1000 steps,0~100%
	Laser wavelength	1064nm, 532nm, 355nm
	Pulse width	500fs
	Spot size	0.8~1.5µm @ 100X object；1.0~3.0µm @ 50X object
	Laser lifetime	>10years, Maintenance interval > 20000 hours
	Energy uniformity of scanning surface	Better than 5% IR
	Repair method	Scanning
	Scanning shape	Customer defined
	Recipes	Customer defined and stored locally
Control	Mode	Automatic repair, automatic data load and communication Semi-automatic/full-automatic repair
	Sample Exchange	Multistation and Automatic exchange
	CIM system	Yes
	Anti-vibration	Vibration free table installed
	Industrial PC	23-inch display & computer: i7 processor, 2 blocks 1TB hard disk (one of which is a backup hard disk), 8G memory, 1G Independent video card, DVD-ROM
	Communication interface	RS232 / EtherCAT / GPIB etc.
	Security	Frame covered, and the operator operates outside.
		EMO
		Limit sensor, Motion platform and Laser system limit interlock
		Alarm