Advanced wafer prober

MDSM-LCVD Laser Repair Machine

MDSM-LCVD6/MDSM-LCVD85
Product description: wafer prober
INQUIRY

Application Direction

TFT-LCD and OLED Array Panel circuit open and short circuit repair, Mask defect repair

Product Introduction

MDSM-LCVD laser repair equipment is an automatic repair equipment designed to repair the defects of LCD screens.

With the leading machine vision system at its core, the equipment can provide high-precision and low-cost solutions for the defects of LCD finished and unfinished products to improve business efficiency to a greater extent.

Product Features

1.High power optical image recognition with automatic focus calibration

2.Laser system visual operation, greatly improve the efficiency of repair

3.Linear motor structure, 1um laser preci-sion, low noise at high speed

4.Automatic AOI positioning, automatic placement of upper and lower wafers

5.Rich software testing function, high precision calibration of mechanical system

6.Editable repair map with multiple stages to work on at the same time.

7.Leading intemal anti shock system device, more stable operation

8.Electrical shielding system, shielding light and electromagnetic interference

Product Parameters

Model		MDSM-LCVD6
Dimension		W: 2850mm * L: 2500mm * H: 2500m
Weight		7500KG
Electricity Demand		380V, 50Hz, 3Phase, approx. 40A Max
Repair capacity	Repairable panel size	L* W ≤ 1500mm * 1850mm,Thickness ≤ 3mm
	CVD material	W, Cr, MO, Al
	Line deposition velocity	5~10µm/s (Thickness 5000A)
	Single defect repair time	After positioning, the time of repairing a single defect is about 5 seconds.
	Recipe	Software edit and stroed locally
	Cutting width	1µm~50µm adjustable
	CVD width	2µm~30µm adjustable
	CVD edge accuracy	±0.5µm
	CVD thickness	2000A~15000A Adjustable
	Resistance of deposition line	<65Ω (width: 5µm, Length: 50μm,Thickness: 5000A)
	CVD stability	Cleaning times by cleaning machine >10 times
		Strong acid-base test > 1H
		Brush wipe > 1H
		Ultrasonic 1Mhz > 1H
Gantry	X-Y-Z travel range	MDSM-LCVD6：1500185058mm；MDSM-LCVD85：2500220058mm
	X-Y velocity	0~400mm/s adjustable
	X-Y resolution (minimum movement)	0.1μm
	Z velocity	0~2mm/s Adjustable
	Z resolution (minimum movement)	0.1μm
	Repeatability accuracy	±5μm
	Repair alignment accuracy	0.1μm
Microscope	Magnification	50X~1000X
	Objectives	5X, 10X, 20X, 50X NIR, 50X UV, 50X NUV Objects
	Optical resolution	0.7µm
	Objective switching speed	0.2~0.7s
	Switching lens deviation	Less than 3µm
	Focus	Laser auto focus
	Cemera	2 million pixels
Lighting		TOP/Bottom coaxial LED light, Light adjustable independently

Model		MDSM-LCVD85
Dimension		W: 4000mm * L: 3500mm * H: 2500m
Weight		10500KG
Electricity Demand		380V, 50Hz, 3Phase, approx. 60A Max
Repair capacity	Repairable panel size	L* W ≤ 2500mm * 2200mm,Thickness ≤ 3mm
Laser	Laser system	DPSS Laser cutting system CW Laser deposition system
	Energy regulationaccuracy	0-1000 steps；0-100%
	Slit size	0~2.5mm
	Slit accuracy	1μm
	Laser energy calibration mode	Automatic calibration
	Calibration time cost	3mins
	Laser energy calibration accuracy	Better than 2%
	Wavelength	Cut Laser: IR 1064nm, GRN 532nm, UV 266nm CVD CW laser: NUV 351nm
	Pulse width	< 12 ns
	Spot size	2.0~ @50X object 1064nm (test on standard mask)
	Scanning energy uniformity	Better than 5% @IR
	Laser lifetime	Cut Laser: 1 billion excitation CVD CW laser: 8000 hours
	Repair mode	Scan mode and Step mode
	Scanning path	Arbitrary path definition
Control	Working mode	Automatic repair, automatic data load, on-line communication Manual or automatic repair
	Panel load	Robot
	CIM system	Yes
	Anti-vibration	Vibration free table installed
	Industry PC	23-inch display & computer: i7 processor, 2 blocks 1TB hard disk (one of which is a backup hard disk),8G memory, 1G Independent video card, DVD-ROM
	Communication interface	RS232 / EtherCAT / GPIB etc.
	Security	Frame covered, and the operator operates outside.
		EMO
		Limit sensor, Motion platform and Laser system limit
		interlock
		Alarm
Lighting		TOP/Bottom coaxial LED light, Light adjustable independently