PR removal RTP USC

  • Tray type PR removal machine
Tray type PR removal machine

Tray type PR removal machine

Application:

DESCUM

Wafer cleaning

Removing residual glue after wet process

Surface residue removal

Remove residual glue after exposure and development

PLASMA Source

RF

Power

1000W

Size

4~12inch

Quantity per one time

4inch=16pcs/6inch=9pcs/8inch=5pcs/12寸=3pcs

size

1200mmx1100mmx1600mm

Control system

PLC

Mode

Manual

导航栏目

联系我们

CONTACT US

联系人:胡顺语

手机:0086-15813334038

电话:020-84789496

邮箱:md@minder-hightech.com

地址: 广州市番禺区大龙街市新路新水坑段43号813