Feature
l Compatible with 6-8inch WAFER
l The maximum temperature can reach 1250°c
l Stable temperature reproducibility
l Fully automatic dual chamber design to increase production capacity
l Uniformity of ultra-high temperature field
l Meet the demand for SlC mass production process
|
ltems |
Indicators |
|
Maximum product size |
6-8 inches |
|
CASSETTE OR SMIF |
Two |
|
Temperature range |
room temperature~1250℃ |
|
Maximum heating rate |
≤30℃/s(carrier) |
|
temperature uniformity |
±3℃≤600℃ ±0.5%>600℃ |
|
Temperature repeatability |
±1℃ |
|
Number of cavities |
Dual chamber |
联系人：胡顺语
手机：0086-15813334038
电话：020-84789496
邮箱：md@minder-hightech.com
地址： 广州市番禺区大龙街市新路新水坑段43号813
