Feature
l Compatible with 6-8inch WAFER
l The maximum temperature can reach 1250°c
l Stable temperature reproducibility
l Fully automatic dual chamber design to increase production capacity
l Uniformity of ultra-high temperature field
l Meet the demand for SlC mass production process
|
ltems |
Indicators |
|
Maximum product size |
6-8 inches |
|
CASSETTE OR SMIF |
Two |
|
Temperature range |
room temperature~1250℃ |
|
Maximum heating rate |
≤30℃/s(carrier) |
|
temperature uniformity |
±3℃≤600℃ ±0.5%>600℃ |
|
Temperature repeatability |
±1℃ |
|
Number of cavities |
Dual chamber |
Contact: Minder Hu
Phone: 0086-15813334038
Tel: 020-84789496
Email: md@minder-hightech.com
Add: 813,No.43,Xinshuikeng Section, Shixin Road, Dalong street,Panyu District,Guangzhou. Zip:511442
