Micro-electronics laboratory machines

Vacuum Plasma Cleaner MD-10L-RF

MD-10L-RF
Product description: Vacuum Plasma Cleaner
INQUIRY

Theory of the Plasma Cleaning

Plasma is a state of existence of matter. Generally, matter exists in three states: solid , liquid ,and gaseous,such as matter on the surface of the sun and the ionosphere in the earth's atmosphere. The state in which this type of matter shrinks is called the plasma state, also known as the fourth state of matter.

The following substances exist in the plasma: electrons in high-speed moving transition states, neutral atoms, molecules,atomic groups (radicals) in excited transition states, and ultraviolet rays generated during the dissociation reaction of ionized atoms, molecules, and molecules.reacting molecules, atoms. etcbut the substance remains electrically neutral in general.The "active" components of plasma include ions, electrons, active groups, excited nuclides (metastable states). photons, and so on.

Plasma cleaning technology uses the characteristics of low-temperature plasma to make the plasma contact and react with the surface of the material, so that the surface of the processed material is chemically and surface etching and physically cleaned, improving the wettability of the surface, implanting new chemical functional groups.

Name	Vacuum plasma cleaner
Model	MD-10L-RF
Control System	PLC+ touch screen
Frequency	13.56 MHz
Voltage	AC 220V (±10V) single-phase
Power	100-300 W (Adjustable )
Gas Flow Control	2-way float flow control
Control Method	Automatic and manual methods
Cavity Size (LWH) mm	250×200×200
Cavity Material	316 Stainless Steel / Aluminum Alloy
Load Specifications (L*W) mm	175×185 (A total of three trays)
Equipment Size (LWH) mm	600×560×520
Cavity Volume	10 L
Degree of Vacuum	30- 100 Pa
Gas Select	Ar 、N2 、O2 、Air 、H2+N2 (Mixed Composition)