MDJC-SE200 Spectroscopic Ellipsometer

Instrument working environment

Power：220VAC±10%

Room temperature：environment temperature(10-30)℃

Relative humidity：(20-80)%RH

Opticalsystem

Incident angle：65°

Beam deviation：<0.3°

Measurement  parameters： Psi&Del、TanPsi&CosDel、Alpha&Beta

Polarizers：Glan-Thompson

Material：a-BBO

Compensator：quarter-wave phase delay,hyper achromatic

Intensity selection：Linear optical density selection element. Ensures good signal-to-noise ratio in measurement process,improves data accuracy,avoids light intensity to saturate or too weak to reduce the signal-to-noise ratio and accuracy.

Optical design：dual fiber convey the light from lamp to spectrometer through polarization elements; stable light path,convenient to change lamps

Fiber：anti-UV  passivation; NA=0.22; clear aperture 600μm

Micro light spot：diameter≤200μm,to distinguish between the useful light reflected from front surface and the useless light reflected from the bottom surface,easy to disassemble

Slit：150μm,for distinguishing between the useful light reflected from front surface and the useless light reflected from the bottom surface.

Spectrometer

Detection unit ：2048 pixel fast back-illuminated CCD detector

Detailed parameters：

A.spectrum range better than 350nm-1000nm

B.stray light<0.02%@400nm

C.signal-to-noise ratio 4800

D.dynamic range 50000:1

E.holographic light path

F.digital resolution 16-bit

J.reading speed >400kHz

K.data transmission speed 600MB/s

H.minimum integration time/adjustment step 6 us/1us

l.external trigger delay 95ns+/-20ns

J.computer interface USB4.1C/2.0

K.operating system Win 7/Win 8/Win 10

verage QE in UV region：back-illuminated CCD,average QE≥75%

Cooling system：micro TE cooling,temperature after cooling is 30℃lower than environment temperature

Integration method：software controlled automatic integration time setting,can achieve best

Light  source  system

Light source：halogen lamp with quartz bulb,wavelength range 350nm-2000nm,no decay lifetime longer than 50000 hours

Power：independent power supply for halogen lamp

voltage：4.9vd

Stage  with  auto  focusing  function

move sample to the best measurement position with auto focusing function

Stroke：100mm

Accuracy：0.0005mm

Location limitation：with both positive and negative limit and zero-position sensor;start position、 ending position、step length of auto focus function can be set in the software

Focus method：using Gaussian regression method;set specified integration time and collect intensity of

Measurement   and   analysis   software

Software modeling：include EMA,Dispersion,Grade,Roughness   etc.

Complex modeling：include  Sellmeier(2)、Sellmeier(3)、Cauchy(n,k)、Cauchy(epsi)、ModifCauchy(n,k)、 Drude、IRTail、Lorentz、Gauss、Critical Point etc.,capability and convenient to use

Refractive index gradient analysis：include vertical gradient analysis of refractive index

Roughness analysis：include roughness analysis of coating interface

Film analysis：capable of both single layer and multi layer analysis,analysis layers is unlimited

Wavelength range and number：self defined analysis wavelength range and number of wavelengths Modified model and fitting：user defined model and regression parameters

Database：provide easy to use and scalable material model database,include dielectric materials、weak absorption films、crystalline and amorphous semi-conductors、metals、organics、glasses、quartz etc.

Wavelength display：can choose to display in energy or wavelength units

Result output：fitted film thickness and n&k constants

suitable for Windows11 OS;graphic operation interface,convenient and

one-click to complete measurement process including auto-focus、light selection、light collection and data analysis,meanwhile step-by-step function buttons are provided

Provided with recipe setting up and saving、report printing functions

Provided with full spectrum measurement data acquirement and recording function,support data saving and searching for future analysis

Test  and  analysis  performances

Speed：1 second

Wavelength range：350nm-1050nm

Thickness accuracy(Display)：0.1A for 100 nm SiO2 on Si

Refractive index accuracy(Display)：1x10-3 for 100 nm SiO2 on Si

Thickness repeatability(10 times Std Dev) ：0.1A for 100 nm SiO2 on Si

Refractive repeatability(10 times Std Dev) ：1x10-3 for 100 nm SiO2 on Si

Thickness range：0.1nm-20000nm

Thickness accuracy：0.3 nm(Difference from standard film)

Refractive index accuracy：0.003(Difference from standard film)

Controlling  system

Motion control：5-axis

Real-time system：including external trigger and software controlled triggert

Polarizer P、compensator C、analyzer A、light selector F、focus axis Z,all axises with zero-position self calibration function

Required   accessory

Computer system：Dell computer or latest commercial PC,with key board and mouse、Ethernet card, Windows operation system,CPU i7 or above,8G DDR or above

1T hard disk or above,23.8"LCD

Standard wafer：1Approximately 100nm and 2nm,oxide layer deposited by LPCVD,no-clean level