Full Spectrum Ellipsometer

1. Product Overview

An ellipsometer measures the change in the polarization state of polarized light after it reflects from or transmits through a thin-film sample. It calculates the thin-film thickness based on two specific ellipsometric parameters that characterize this change: the amplitude ratio tan(Ψ) and the phase difference Δ. Since these parameters depend directly on the optical properties and thicknesses of the sample's constituent layers, ellipsometers are primarily used to measure thin-film thickness and optical constants.

The MD-ELM series consists of high-performance spectroscopic ellipsometers designed for R&D and quality control applications, covering a spectral range from ultraviolet (UV) and visible (Vis) to near-infrared (NIR).

Equipped with a high-sensitivity detection unit and specialized analysis software, the MD-ELM-I spectroscopic ellipsometer is designed to measure and analyze the structural parameters (e.g., thickness) and physical properties (e.g., refractive index *n* and extinction coefficient *k*) of multilayer nanofilms in the photovoltaic sector. Typical samples include:

1. Dielectric thin-film stacks (e.g., SiO₂/Si₃N₄multilayer films in semiconductor devices)

2. Metal and metal oxide thin films (e.g., Al₂O₃passivation layers, TiO₂optical coating layers)

3. Organic/inorganic composite thin films (e.g., perovskite films in solar cells, polymer dielectric films)

Figure 1 Schematic diagram of the MD-ELM-Ⅰ measurement optical path

2. Product Features

1. Rapid, precise spectroscopic ellipsometry measurement and analysis

2. Multi-angle of incidence measurement

3. Stepping compensator scanning mode

4. Broadband super-achromatic compensator

5. Powerful spectroscopic ellipsometry measurement and analysis software

6. User-friendly software, suitable for beginners

7. Proprietary material database and preset software applications to simplify modeling

3. Technical Advantages

1. Advanced RCE (Rotating Compensator Ellipsometer) measurement technology: 0–360° measurement range with no measurement dead zones;

2. High-sensitivity measurement for nano-thin films: Features advanced optical energy enhancement, high signal-to-noise ratio (SNR) detection technology, and high-SNR weak signal processing methods;

3. Multi-layer thin film inspection design: Capable of inspecting dual-layer films across various industries;

4. Rapid full-spectrum measurement: Typical full-spectrum measurement time is approximately 5 seconds (per point);

5. Sub-nanometer detection sensitivity: Measurement precision reaches 0.05 nm;

6. Adjustable multi-angle incidence: A multi-angle design enhances measurement flexibility, making it particularly suitable for complex sample measurement scenarios;

7. Signal-based sample alignment: Ensures precise sample alignment and easy observation, thereby reducing human error;

8. One-click operation: Routine tasks—including complex measurement, fitting, and analysis—can be completed with a single mouse click; an extensive model and material library also supports advanced user requirements.

4. Technical Specifications

4.1 Key Test Indicators

4.2 Hardware and Software Specifications

The MD-ELM-I full-spectrum ellipsometer standard testing system comprises:

Light Source Module

1. Light source: 150W steady-state xenon lamp

2. Wavelength range: 200–2500 nm (enhanced output above 300 nm)

3. Service life: ≥3000 hours

4. Regulated power supply control unit: 150W; input voltage: AC 220V (±10%) / 50Hz

Spectral Detector

1. Detectable spectral range: 200–1100 nm

2. Back-illuminated, TE-cooled (semiconductor cooling) area-array CCD detector

3. Effective pixels: 2048 × 64

4. Configurable integration parameters

Mechanical Module

1. Rear-mounted optical attenuator; automatically adjusts signal saturation based on the sample being tested

2. High-precision stepper motor control

Software System

1. Calibration function: allows system hardware parameters to be calibrated using standard samples; simple and user-friendly operation

2. Automatic setting of optical component azimuth angles

3. Automatic generation of n and k curves

4. Ellipsometric parameters (including Δ) and related output formats

5. User-friendly, extensible material database; includes common application model fitting

6. File output formats include .txt, Excel, and standard formats used for quality control

5. Product Configuration List

5.1 Standard Configuration Delivery List

5.2 List of Optional Configurations