PVD CVD ALD RIE ICP EBEAM

PECVD Plasma enhanced chemical vapor deposition equipment

made to order
Product description: PECVD Plasma enhanced chemical vapor deposition equipment
INQUIRY

Product introduction

◆ Fully automatic control of process time, temperature, gas flow, valve action and reaction chamber pressure is realized by industrial computer.

◆ Imported pressure control system and closed loop system are adopted, with high stability.

◆ Imported corrosion-resistant stainless steel pipe fittings and valves are used to ensure the air tightness of the gas circuit.

◆ It has perfect alarm function and safety interlock device.

◆ It has ultra-high temperature alarm and under-temperature alarm, MFC alarm, reaction chamber pressure alarm, RF alarm, low compressed air pressure alarm, low N2 pressure alarm, and low cooling water flow alarm.

◆ The existing PECVD has the function of growing SiO2 film after upgrading, which solves the PID problem of battery module.

SiNxOy film can be grown (back passivation process), which can greatly improve the conversion efficiency of the battery.

Type

◆ Loading quantity: 384 pieces/boat (125 * 125); 336 pieces/boat (156 * 156)

◆ Cleanliness of purification table: Grade 100 (Grade 10000 plant)

◆ Automation degree: automatic control of temperature and process.

◆ Chip sending and taking mode: soft landing type, with stable and reliable characteristics, no creeping, accurate positioning, large bearing capacity and long service life.

Main parameter

Maximum loading per tube	384 pieces/boat（125125） 336 pieces/boat（156156）
Process index	± 3% in tablet, ± 3% between tablets, ± 3% between batches
working temperature	200~500℃
Accuracy and length of temperature zone (static closed tube test)	1200mm±1℃
Gas flow accuracy	±1%FS
Air tightness of air circuit system	1×10-7Pa.m³/S
control	Fully imported automatic pressure closed-loop regulating system, precise control of reaction vacuum; 40KHz high-frequency power supply; Craft boat soft landing; Full digital control, perfect and safe process control protection.
1 tube, 2 tubes, 3 tubes and 4 tubes are optional; The automatic loading manipulator is optional, and the equipment performance and process performance can be can be comparable with the world's top similar equipment.