Sputtering coater

Magnetron Ion Sputtering and Thermal Evaporation Carbon Coater - SD900C

Magnetron Ion Sputtering and Thermal Evaporation Carbon Coater - SD900C

SD900C
Product description: Sputtering Coater
INQUIRY

Magnetron Ion Sputtering + Thermal Evaporation Carbon

Coater - SD900C Model

We supplies / offers a Magnetron Ion Sputtering Unit + Thermal Evaporation Carbon Unit (SD900C Model) that is ideal and designed for lab SEM sample preparation. SD900C Model (Magnetron Ion Sputtering Unit) is widely used to coat non-conductive or heat-sensitive SEM samples with Au for better imaging. It is also excellent for surface treatment and avoids damage to the substrate sample.

SD900C Model (Thermal Evaporation Carbon Unit) carbon coater applies a thin conductive carbon film on a sample surface. Applying this coating to a non-conductive sample is an effective preparation technique for diminishing charge-up electron artifacts for analysis in a SEM.

Working vacuum pressure can be achieved quickly when using proper vacuum pump within 5 minutes. It is user friendly and easy to operate.

Vacuum pump is included.

Chiller is optional. (for Magnetron Ion Sputtering Unit)

Technical Specifications
Vacuum Pump Set	(Oil required) Rotary Vacuum Pump
Rotary Pumping Speed	50 Hz : 8 m3/h(2.2 L/s) / 60Hz : 9.6m3/h (2.6 L/s)
Vacuum Limit	2 Pa
Max Sputtering Current	100 mA
Max Evaporation Current	100A
Sputtering Working Pressure	20Pa-8Pa
Working Vacuuming Time	6Pa-4Pa
Vacuum Measure	<5 Min(2 Pa)
Gas Control	Measuring range from atmosphere to 2*10-2mbar
Chamber Size	Gas Flow Controller
Magnetron Target Source	φ150* 120mm (height)Scratch Resistant Quartz Glass
Evaporation Target Source	Target size φ 50*0.1mm (Au) / Target source:Au, Ag,Pt
Operation Method	Target material: Carbon Rope / Target source: Carbon Rope
(2 Units) Weight / (1 Unit)Size	55kg / 360mm length * 300mm wide * 380mm high
Power Supply	AC 110V 60Hz or AC 220V 50Hz
Power Consumption	<200ow
Cooling Method	Air Cooling (Evaporation) + Water Cooling (Sputtering)
Warranty	One year limited warranty with lifetime product support